Pure Wafer installed the latest generation of tools available on the market. We have built a very close relationship with all of the chosen tool suppliers. We strive to ensure that the tool designs we have specified will ensure our process can achieve not only the current high quality needs of the industry but is also scalable for those that are still under development. The equipment set we use is the same as in the most advanced IC and prime silicon producers. All critical processes are fully automated to eliminate the influence of human handling.

Semi-automated wet benches for strip and etch with software controlled automated transfer between the different process bathes. The tools are designed for 200 as well as 300mm operation. Dedicated tools will be available for different products.

Latest proprietary measurement in-situ technology will be used to maintain the process at optimal conditions. The polishing tools are identical to those used by the world leading prime wafer suppliers. Through their leading edge design and exceptionally rigid construction and build quality they can achieve surface finish and flatness to world leading class specifications.

Final cleaning is performed with the use fully automated wet benches and advanced vapour phase drying technology. The benches will be run with dual I/O stations for transferring the wafers from the transport boat into the process carrier which will stay in the tool all the time, minimizing the risk of cross contamination. The tools are designed for high throughput operation, equipped with megasonic process tanks, multiple transfer robots and specially designed carriers to achieve good cleaning over the whole surface of the wafer.

The facility is equipped with the latest generation of measurement, inspection and surface analysis tools.

Business management systems are fundamental to Pure Wafer's offering. Significant capital and manpower has been invested in systems to execute our mission statement. We operate an individual wafer tracking system throughout our factory which benefits our customers. We are able to monitor production efficiency and effectiveness in all areas providing a tool for continual improvement. Our customers are able to maximise the application and numbers of reclaim per wafer by direct access to our live information via our secure customer intranet.

Pure wafer has a separate copper Fab running dedicated copper lines for 200 and 300 mm reclaim. This facility allows our customers to maximize the savings from reclaiming as many wafers as possible with the security that copper and non copper wafers are kept completely separate. Special processes and techniques have been developed to overcome the different challenges associated with these wafers types.

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